Redefining performance in Probe Card analyzing

Athena is a new generation metrology tool designed to perform better POR optical, mechanical, and electrical measurements on Probe Cards.
3x faster optical alignment
Flying probe loopback
6 µm V-align spec
600 kg force
3x faster wire check
Optical planarity measurement
Configuration options:

Probe Card analyzer with debug station
Enables deep debug on Probe Cards and 100% tests.
Compatible with legacy motherboards.

Probe Card analyzer with autoloader
Ideal for HVM throughput, enables statistical data collection on several Probe Cards.
Highlights
- High-precision optical probe position measurement in X, Y, and Z including planarity
- Fine-pitch probe measurement, as low as 25 µm
- Multiple probe types in single array
- Flexible, feature-rich vision system for wide variety of probe types
- Probe tip 3D morphology
- Probe free-tip-length measurement
- High channel count: 9216
- Loaded and unloaded electrical planarity measurement
- DC loopback testing
- Board-only testing
- Contact resistance stability across multiple probe tip metallurgies
- High-frequency testing (AC loopback)
- High array force up to 600 kg
- Full-wafer 12’’/300 mm
- Closed-loop stages with 0.01 μm encoders
- High accuracy and stability: demonstrated tool-to-tool correlation across fleet
- Interchangeable interface design: compatible for probecards of any tester platform (V93k, Ultraflex, HDMT…)
- Fully automated: choose any suite of tests
- Test data analytics
- Option: multiple-probecard autoloader, or debug station

Measurement capabilities
Optical alignment by 3D inspection system
(WLI, white light interferometer)
Unloaded electrical planarity by post
Loaded electrical planarity by plate
Contact resistor versus conductive plate
Leakage at overtravel and without load
Test of capacitors value in farad
Test of resistors value in ohm
Electrical continuity check and path resistance measurement on loopbacks within ST or PCB
Capacitor leakage at overtravel and without load
Probe Card load in overtravel
Measurement | Athena Capability (σ) | Comparison to Legacy Analyzer |
Optical Alignment @WLI | X/Y = 0.16 um | 2x better |
Z = 0.15 um | N/A | |
LEP@Plate | 0.3 um | 2.75x better |
Cres@Plate | 0.005 Ohm | 5x better |
Array Force | 0.25 kg | N/A |
Performance benchmark
Measurement | Athena Acquisition time | Legacy Acquisition time |
Optical Alignment @WLI | 90 min | 240 min |
Cres@Plate | 90 sec | 15 min |
Leak@Free | 3 min | 5 min |
CAP | 4 min | 20 min |
UEP | > 7 p/sec | 2 p/sec |