Athena

Athena

Fully Automated Probe Card Analyzer

Redefining performance in Probe Card analyzing

Athena by Technoprobe

 

Athena is a new generation metrology tool designed to perform better POR optical, mechanical, and electrical measurements on Probe Cards.

Play video

3x faster optical alignment

Flying probe loopback

6 µm V-align spec

600 kg force

3x faster wire check

Optical planarity measurement

Configuration options:

Athena with debug station

Probe Card analyzer with debug station

Enables deep debug on Probe Cards and 100% tests.
Compatible with legacy motherboards.

Athena with autoloader

Probe Card analyzer with autoloader

Ideal for HVM throughput, enables statistical data collection on several Probe Cards.

Highlights

  • High-precision optical probe position measurement in X, Y, and Z including planarity
  • Fine-pitch probe measurement, as low as 25 µm
  • Multiple probe types in single array
  • Flexible, feature-rich vision system for wide variety of probe types
  • Probe tip 3D morphology
  • Probe free-tip-length measurement
  • High channel count: 9216
  • Loaded and unloaded electrical planarity measurement
  • DC loopback testing
  • Board-only testing
  • Contact resistance stability across multiple probe tip metallurgies
  • High-frequency testing (AC loopback)
  • High array force up to 600 kg
  • Full-wafer 12’’/300 mm
  • Closed-loop stages with 0.01 μm encoders
  • High accuracy and stability: demonstrated tool-to-tool correlation across fleet
  • Interchangeable interface design: compatible for probecards of any tester platform (V93k, Ultraflex, HDMT…)
  • Fully automated: choose any suite of tests
  • Test data analytics
  • Option: multiple-probecard autoloader, or debug station
Athena Dimensions

Measurement capabilities

Optical alignment by 3D inspection system
(WLI, white light interferometer)

Unloaded electrical planarity by post

Loaded electrical planarity by plate

Contact resistor versus conductive plate

Leakage at overtravel and without load

Test of capacitors value in farad

Test of resistors value in ohm

Electrical continuity check and path resistance measurement on loopbacks within ST or PCB

Capacitor leakage at overtravel and without load

Probe Card load in overtravel

Performance benchmark

Throughput benchmark

Contacts